4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Randall S. Mundt

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Apparatus and method for eliminating unwanted materials from a g

Chemistry of inorganic compounds – Modifying or removing component of normally gaseous mixture
Patent

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Apparatus and method for mapping plasma characteristics

Optics: measuring and testing – By dispersed light spectroscopy – With sample excitation
Patent

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Apparatus for characterization of microelectronic feature...

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Data collection methods and apparatus

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Electrical signal parameter measurement system
Reexamination Certificate

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Hybrid electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Profile ID: LFUS-PAI-P-52230

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