Method and structure for protecting NROM devices from...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

Reexamination Certificate

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C438S263000, C438S216000, C438S287000, C438S288000, C438S258000, C257S324000, C257S173000, C257SE21423, C257SE29309, C257SE25024, C257S355000

Reexamination Certificate

active

06869844

ABSTRACT:
A structure for protecting an NROM from induced charge damage during device fabrication is described. The structure provides a discharge path for charge accumulated on the polygate layer during fabrication while providing sufficient isolation to ensure normal circuit operation.

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