Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1991-04-23
1992-07-14
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156626, 156646, 156345, H01L 21306, B44C 122
Patent
active
051299941
ABSTRACT:
A method and apparatus are described for inhibiting visual obstruction of the window of a semiconductor etch process chamber by deposition of each byproducts thereon by selectively heating the window surfaces adjacent one edge of the window to thereby form a cool region on the window surfaces adjacent the opposite edge of the window whereby the center of the window will remain substantially clear of such depositions. The apparatus for carrying out the method of the invention comprises a first heat transmitting structure disposed on one surface of an optically transparent window adjacent one edge, and a second heat transmitting structure disposed on the opposite surface of the optically transparent window adjacent the same edge to thereby provide even heating of both surfaces of the window adjacent the one edge, thereby creating a cooler zone on the window surfaces adjacent the opposite edge of the window.
REFERENCES:
patent: 4857139 (1989-08-01), Tashiro et al.
patent: 4883560 (1989-11-01), Ishihara
patent: 4964940 (1990-10-01), Auvert et al.
patent: 5002631 (1991-03-01), Giapis et al.
Chuc Kien N.
Ebbing Peter F.
Ford Jack
Hariz Fred H.
Sugarman Michael N.
Applied Materials Inc.
Powell William A.
Taylor John P.
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