4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Michael N. Sugarman

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Apparatus for improved biasing and retaining of a workpiece in a

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Cathode assembly containing an electrostatic chuck for...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Combined wafer support and temperature monitoring device

Batteries: thermoelectric and photoelectric – Thermoelectric – Having housing – mounting or support
Patent

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Conductive feed-through for creating a surface electrode...

Electricity: conductors and insulators – Conduits – cables or conductors – Preformed panel circuit arrangement
Reexamination Certificate

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Method and apparatus for reducing thermal gradients within a...

Electric heating – Heating devices – With power supply and voltage or current regulation or...
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Profile ID: LFUS-PAI-P-303244

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