Method and apparatus of fabricating semiconductor device

Details Method and apparatus of fabricating semiconductor device Method and apparatus of fabricating semiconductor device

2005-05-12

2010-12-28

Ghyka, Alexander G (Department: 2812)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S276000, C438S513000, C257SE21196, C257SE21197, C250S492200, C250S492210

Reexamination Certificate

active

07858479

ABSTRACT:
An object is to provide a semiconductor device in which uniform properties are intended and high yields are provided. Process steps are provided in which variations are adjusted in doping and annealing process steps that are subsequent process steps so as to cancel in-plane variations in a substrate caused by dry etching to finally as well provide excellent in-plane consistency in a substrate.

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