4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...

Cheng-Guo Jin

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Impurity introducing apparatus and impurity introducing method

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Impurity introducing apparatus and impurity introducing method

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Method and apparatus for plasma processing

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Plasma
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Method and apparatus of fabricating semiconductor device

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Method for introducing impurities

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Plasma
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Profile ID: LFUS-PAI-P-2206496

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