Method and apparatus for the depth-resolved characterization...

Details Method and apparatus for the depth-resolved characterization... Method and apparatus for the depth-resolved characterization...

2008-04-15

2008-04-15

Kim, Robert (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

C250S492200, C250S492300, C250S492210, C250S307000, C250S310000

Reexamination Certificate

active

11196513

ABSTRACT:
The present invention relates to a method for the depth-resolved characterization of a layer of a carrier. This involves firstly producing a cutout in the layer of the carrier with a sidewall and subsequently removing carrier material adjoining the sidewall with the aid of an ion beam. During the removal process, images of the sidewall are recorded and material compositions of the removed carrier material are determined as well. A depth-resolved characterization of the layer of the carrier is carried out on the basis of a correlation of the determined material compositions of the removed carrier material with the recorded images of the sidewall, layer depths being assigned to the material compositions of the removed carrier material with the aid of the images of the sidewall. The invention furthermore relates to an apparatus for carrying out this method.

REFERENCES:
patent: 6268608 (2001-07-01), Chandler
patent: 6414307 (2002-07-01), Gerlach et al.
patent: 6649919 (2003-11-01), Chao et al.
patent: 6794663 (2004-09-01), Shichi et al.
patent: 2229115 (2004-05-01), None
P. Gnauck et al., (Mar. 2002) “A New CrossBeam Inspection Tool Combining an Ultrahigh Resolution Field Emission SEM and a High Resolution FIB,” Proceedings of the SPIE—The International Society for Optical Engineering Vo. 4689, pp. 833-840.

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