4. Optics: measuring and testing
  5. By polarized light examination
  6. Of surface reflection

Ulrich Mantz

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In-situ method for measuring the endpoint of a resist recess...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – For fault location
Reexamination Certificate

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Ion sources, systems and methods

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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Measurement system and method for measuring critical dimensions

Optics: measuring and testing – By polarized light examination – Of surface reflection
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Method and apparatus for measuring a surface profile of a...

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Method and apparatus for measuring a surface profile of a...

Semiconductor device manufacturing: process – With measuring or testing
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