Method and apparatus for scatterfield microscopical measurement

Details Method and apparatus for scatterfield microscopical measurement Method and apparatus for scatterfield microscopical measurement

2011-01-18

2011-01-18

Chowdhury, Tarifur R. (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

C356S237200, C356S237500, C356S497000, C359S235000, C359S368000

Reexamination Certificate

active

07872741

ABSTRACT:
A method and an apparatus are disclosed for scatterfield microscopical measurement. The method integrates a scatterometer and a bright-field microscope for enabling the measurement precision to be better than the optical diffraction limit. With the aforesaid method and apparatus, a detection beam is generated by performing a process on a uniform light using an LCoS (liquid crystal on silicon) or a DMD (digital micro-mirror device) which is to directed to image on the back focal plane of an object to be measured, and then scattered beams resulting from the detection beam on the object's surface are focused on a plane to form an optical signal which is to be detected by an array-type detection device. The detection beam can be oriented by the modulation device to illuminate on the object at a number of different angles, by which zero order or higher order diffraction intensities at different positions of the plane at different incident angles can be collected.

REFERENCES:
patent: 6133986 (2000-10-01), Johnson
patent: 6392752 (2002-05-01), Johnson
patent: 6934079 (2005-08-01), Hell et al.
patent: 7061623 (2006-06-01), Davidson
patent: 7545505 (2009-06-01), Lehmann et al.
patent: 2003/0021016 (2003-01-01), Grier
patent: 2004/0174593 (2004-09-01), Weyh et al.
patent: 2007/0035734 (2007-02-01), Muller et al.
patent: 2007/0051869 (2007-03-01), Knebel
patent: 2008/0037114 (2008-02-01), Sheblee et al.
“Scatterfield Microscopy Using Back Focal Plane Imaging with an Engineered Illumination Field,” Proc. of SPIE, vol. 6152. 61520J (2006) by H. J. Patrick, R. Atota, B. M. Barnes, et al., with National Institute of Standards and Technology (NIST).

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