4. Optics: measuring and testing
  5. Inspection of flaws or impurities

Deh-Ming Shyu

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Dual-lens hybrid diffractive/refractive imaging system

Optical: systems and elements – Diffraction – From grating
Reexamination Certificate

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Method and apparatus for scatterfield microscopical measurement

Optics: measuring and testing – Inspection of flaws or impurities
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Reflective scatterometer

Optics: measuring and testing – Of light reflection – With diffusion
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Profile ID: LFUS-PAI-P-2262035

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