4. Optics: measuring and testing
  5. Inspection of flaws or impurities

Yi-Sha Ku

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Method and apparatus for scatterfield microscopical measurement

Optics: measuring and testing – Inspection of flaws or impurities
Reexamination Certificate

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Overlay measurement target

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Overlay measurement target

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Reflective scatterometer

Optics: measuring and testing – Of light reflection – With diffusion
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2262037

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