4. Electric heating
  5. Heating devices
  6. With power supply and voltage or current regulation or...

Brad Mays

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Correction of wafer temperature drift in a plasma reactor...

Thermal measuring and testing – Temperature measurement – Combined with diverse art device
Reexamination Certificate

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Correction of wafer temperature drift in a plasma reactor...

Electric heating – Heating devices – With power supply and voltage or current regulation or...
Reexamination Certificate

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Method and apparatus for operating an electrostatic chuck in...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2463295

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