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Epion Corporation

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Adaptive GCIB for smoothing surfaces

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
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Adaptive GCIB for smoothing surfaces

Etching a substrate: processes – Planarizing a nonplanar surface
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Apparatus and method for reduced particulate generation...

Work holders – With fluid means – Vacuum-type holding means
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Charging control and dosimetry system for gas cluster ion beam

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Detector and method for cluster ion beam diagnostics

Radiant energy – Ionic separation or analysis – With sample supply means
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Profile ID: LFUS-PAI-P-235195

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