Method and apparatus for generating highly dense uniform plasma

Details Method and apparatus for generating highly dense uniform plasma Method and apparatus for generating highly dense uniform plasma

1993-03-30

1994-07-26

Paschall, Mark H.

Electric heating

Metal heating

By arc

21912143, 21912154, 21912144, 156345, 156646, 20429808, 20429834, 20429831, B23K 900, H01L 21306

Patent

active

053328809

ABSTRACT:
At lateral sides of a plasma generating part under a vacuum, first to fourth lateral electrodes are so disposed as to surround the plasma generating part. High frequency electric power is supplied to the first lateral electrode from a first high frequency power supply, high frequency electric power is supplied to the second lateral electrode from the first high frequency power supply through a first delay circuit, high frequency electric power is supplied to the third lateral electrode from the first high frequency power supply through the first delay circuit and through a second delay circuit, and high frequency electric power is supplied to the fourth lateral electrode from the first high frequency power supply through the first and second delay circuits and through a third delay circuit. Accordingly, there are respectively applied, to the first to fourth lateral electrodes, the high frequency electric powers of which frequencies are equal to one another and of which phases are successively different from one another, and there is excited, in the plasma generating part, a rotational electric field to cause electrons in the plasma generating part to present rotational motions.

REFERENCES:
patent: 4253907 (1981-03-01), Parry et al.
patent: 4724296 (1988-02-01), Moriey

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