4. Electric heating
  5. Metal heating
  6. By arc

Mitsuhiro Ohkuni

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Apparatus and method for plasma etching

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Apparatus and method for plasma etching

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
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Apparatus for plasma etching having rotating coil responsive...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
Reexamination Certificate

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Etching method and etching apparatus

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Method and apparatus for generating highly dense uniform plasma

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
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Profile ID: LFUS-PAI-P-1201390

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