4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Kenji Harafuji

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active

Bipolar transistor and semiconductor device

Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – Field effect transistor
Reexamination Certificate

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Dry etching Method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Dry etching method and dry etching apparatus

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent

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Drying etching method

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent

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Electron beam exposure evaluation method

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Profile ID: LFUS-PAI-P-610887

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