Method and apparatus for detecting a circuit pattern

Details Method and apparatus for detecting a circuit pattern Method and apparatus for detecting a circuit pattern

1992-03-04

1994-07-19

Evans, F. L.

Optics: measuring and testing

By configuration comparison

With comparison to master, desired shape, or reference voltage

356237, 382 8, G01N 2188, G01B 700

Patent

active

053314077

ABSTRACT:
A method and apparatus for detecting a circuit pattern comprise a stage for mounting an object under inspection having a circuit pattern to be detected, means of generating a signal in response to the amount of movement of the stage, a detection optical system for detecting the circuit pattern, an opto-electric transducer which receives the image of the pattern provided by the detection optical system and transforms the image into an image signal, means of calculating the amount of expansion or contraction of the object by detecting the distance between specific patterns on the object, and drive control means which produces a clock signal for the opto-electric transducer based on the stage movement signal provided by the signal generation means and varies the clock signal so as to vary the dimension of the detected image arbitrarily.

REFERENCES:
patent: 4012147 (1977-03-01), Walrafen
patent: 4559603 (1985-12-01), Yoshikawa et al.
patent: 4628531 (1986-12-01), Okamoto et al.
patent: 4993834 (1991-02-01), Carlhoff et al.

Affiliated with

Also associated with

Rating

Method and apparatus for detecting a circuit pattern does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for detecting a circuit pattern, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for detecting a circuit pattern will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-524078