Coating processes – Centrifugal force utilized
Reexamination Certificate
2007-04-17
2007-04-17
Parker, Fred J. (Department: 1762)
Coating processes
Centrifugal force utilized
C427S426000, C137S896000, C134S036000, C134S100100
Reexamination Certificate
active
09891833
ABSTRACT:
A method of and apparatus for mixing chemicals in a single wafer process. According to the present invention a chemical is fed into a valve system having a tube of a known volume. The chemical is fed into the valve system to fill the tube with a chemical to generate a measured amount of the chemical. The measured amount of chemical is then used in a single wafer process.
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Endo Rick R.
Ko Alexander
Truman J. Kelly
Verhaverbeke Steven
Applied Materials Inc.
Blakely & Sokoloff, Taylor & Zafman
Parker Fred J.
Turocy David
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