Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Reexamination Certificate
2006-09-12
2006-09-12
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Positive ion probe or microscope type
C250S281000, C250S282000, C250S306000, C250S307000, C250S492200, C073S864910
Reexamination Certificate
active
07105813
ABSTRACT:
An ion analyzing apparatus for analyzing the composition of an object includes a chamber maintained under a vacuum, a support for supporting a plurality of objects disposed in the chamber, and a drive unit that selects one of the supported objects and rotates the selected object. An ion generator irradiates the rotating object with primary ions. A detector detects secondary ions emitted from the rotating object. An analyzer analyzes the secondary ions. A transfer device is connected to the supporter. The transfer device rotates the support or moves the support linearly in a horizontal direction to place an object at a predetermined position at which the object is selected and rotated by the drive unit.
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patent: 6820508 (2004-11-01), Lee
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patent: 1020030023166 (2003-03-01), None
Samsung Electronics Co,. Ltd.
Volentine Francos & Whitt PLLC
Wells Nikita
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