Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate
2006-02-07
2006-02-07
Ghyka, Alexander (Department: 2812)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
C438S014000, C438S795000, C134S001000
Reexamination Certificate
active
06995067
ABSTRACT:
A system and method of cleaning a substrate includes a megasonic chamber that includes a transducer and a substrate. The transducer is being oriented toward the substrate. A variable distance d separates the transducer and the substrate. The system also includes a dynamically adjustable RF generator that has an output coupled to the transducer.
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International Search Report dated Oct. 18, 2004.
Anderson Thomas W.
Boyd John
Kuthi Andras
Smith Michael G. R.
Thie William
Ghyka Alexander
Lam Research Corporation
Martine & Penilla & Gencarella LLP
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