4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Shinji Himori

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Apparatus for holding an object to be processed

Adhesive bonding and miscellaneous chemical manufacture – Differential etching apparatus including focus ring...
Reexamination Certificate

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Capacitive coupling plasma processing apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
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Electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Matching unit and plasma processing system

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Method of forming a thin film

Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of substrate or post-treatment of coated substrate
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Profile ID: LFUS-PAI-P-1316490

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