4. Data processing: generic control systems or specific application
  5. Specific application, apparatus or process
  6. Product assembly or manufacturing

Mitsuhiro Yuasa

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Drop detection device or abnormality detection device and...

Communications: electrical – Condition responsive indicating system – Specific condition
Reexamination Certificate

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Matching unit and plasma processing system

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Method of manufacturing mask for electron beam lithography...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Microwave plasma processing apparatus having a vacuum pump...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Plasma processing apparatus

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2251062

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