Manufacturing method for microelectronic device

Details Manufacturing method for microelectronic device Manufacturing method for microelectronic device

2007-03-27

2007-03-27

Huynh, Andy (Department: 2818)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S014000, C438S656000

Reexamination Certificate

active

10822960

ABSTRACT:
A method of manufacturing a microelectronic device, including performing a first inspection of a device feature during an intermediate stage of manufacture, cleaning the device feature after the first inspection, and performing a second inspection of the device feature after cleaning the device feature.

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