4. Optics: measuring and testing
  5. Dimension
  6. Thickness

Pey-Yuan Lee

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Linewidth measurement tool calibration method employing...

Data processing: measuring – calibrating – or testing – Calibration or correction system – Length – distance – or thickness
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Manufacturing method for microelectronic device

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Method for improved dielectric layer metrology calibration

Optics: measuring and testing – Dimension – Thickness
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Profile ID: LFUS-PAI-P-2715109

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