Low-cost deep trench decoupling capacitor device and process...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S516000, C257SE27093

Reexamination Certificate

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10905094

ABSTRACT:
A novel trench-type decoupling capacitor structure and low-cost manufacturing process to create trench decoupling capacitors (decaps). In a unique aspect, the invention necessitates the addition of only a simplified trench to a base logic design.

REFERENCES:
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patent: 5770875 (1998-06-01), Assaderaghi et al.
patent: 5805494 (1998-09-01), El-Kareh et al.
patent: 6057188 (2000-05-01), El-Kareh et al.
patent: 6236079 (2001-05-01), Nitayama et al.
patent: 6399978 (2002-06-01), Gruening et al.
patent: 2001/0038112 (2001-11-01), Gambino et al.

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