Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2011-01-18

2011-01-18

Souw, Bernard E (Department: 2881)

Radiant energy

Luminophor irradiation

With ultraviolet source

C250S50400H, C315S111210, C376S144000, C378S034000

Reexamination Certificate

active

07872244

ABSTRACT:
A source configured to generate radiation for a lithographic apparatus is disclosed. The source includes an anode, and a cathode. The cathode and the anode are configured to create a discharge in a fuel in a discharge space between the anode and the cathode so as to generate a plasma, the cathode and the anode positioned relative to each other so that, in use, current lines extending between the anode and the cathode are substantially curved so as to create a force that substantially radially compresses the plasma only in a region proximate an upper surface of the cathode or of the anode.

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