4. Radiant energy
  5. Luminophor irradiation
  6. With ultraviolet source

Vladimir Vitalevich Ivanov

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Apparatus with plasma radiation source and method of forming...

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate

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Lithographic apparatus and device manufacturing method

Radiant energy – Luminophor irradiation – With ultraviolet source
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2332597

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