Linear polishing sheet with window

Details Linear polishing sheet with window Linear polishing sheet with window

2006-01-31

2006-01-31

Nguyen, George (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

By optical sensor

C451S041000, C451S288000, C451S296000

Reexamination Certificate

active

06991517

ABSTRACT:
A polishing article for chemical mechanical polishing. The polishing article includes a generally elongated polishing sheet with a polishing surface. The polishing article is formed from a material that is substantially opaque, and has a discrete region extending substantially the length of the polishing sheet that is at least semi-transparent.

REFERENCES:
patent: 3888050 (1975-06-01), Elm
patent: 4676029 (1987-06-01), Palmer
patent: 5016400 (1991-05-01), Weber
patent: 5081796 (1992-01-01), Schultz
patent: 5127196 (1992-07-01), Morimoto et al.
patent: 5196353 (1993-03-01), Sandhu et al.
patent: 5257478 (1993-11-01), Hyde et al.
patent: 5265378 (1993-11-01), Rostoker
patent: 5413941 (1995-05-01), Koos et al.
patent: 5433651 (1995-07-01), Lustig et al.
patent: 5484323 (1996-01-01), Smith
patent: 5489233 (1996-02-01), Cook et al.
patent: 5558568 (1996-09-01), Talieh et al.
patent: 5563524 (1996-10-01), Ungar
patent: 5575707 (1996-11-01), Talieh et al.
patent: 5593344 (1997-01-01), Weldom et al.
patent: 5597341 (1997-01-01), Kodera et al.
patent: 5605760 (1997-02-01), Roberts
patent: 5609511 (1997-03-01), Moriyama et al.
patent: 5640242 (1997-06-01), O'Boyle et al.
patent: 5643046 (1997-07-01), Katakabe et al.
patent: 5672091 (1997-09-01), Takahashi et al.
patent: 5692947 (1997-12-01), Talieh et al.
patent: 5722875 (1998-03-01), Iwashita et al.
patent: 5722877 (1998-03-01), Meyer et al.
patent: 5747385 (1998-05-01), Torii
patent: 5762536 (1998-06-01), Pant et al.
patent: 5791969 (1998-08-01), Lund
patent: 5800248 (1998-09-01), Pant et al.
patent: 5803799 (1998-09-01), Volodarsky et al.
patent: 5838447 (1998-11-01), Hiyama et al.
patent: 5846882 (1998-12-01), Birang
patent: 5872633 (1999-02-01), Holzapfel et al.
patent: 5888119 (1999-03-01), Christianson et al.
patent: 5893796 (1999-04-01), Birang et al.
patent: 5949927 (1999-09-01), Tang
patent: 5961372 (1999-10-01), Shendon
patent: 5964643 (1999-10-01), Birang et al.
patent: 6045439 (2000-04-01), Birang et al.
patent: 6146248 (2000-11-01), Jairath et al.
patent: 6171181 (2001-01-01), Roberts et al.
patent: 6179709 (2001-01-01), Redeker et al.
patent: 6183354 (2001-02-01), Zuniga et al.
patent: 6244935 (2001-06-01), Birang et al.
patent: 6254459 (2001-07-01), Bajaj et al.
patent: 6280289 (2001-08-01), Wiswesser et al.
patent: 6280290 (2001-08-01), Birang et al.
patent: 6358130 (2002-03-01), Freeman et al.
patent: 6524164 (2003-02-01), Tolles
patent: 6585563 (2003-07-01), Redeker et al.
patent: 6604985 (2003-08-01), Muilenburg et al.
patent: 6786810 (2004-09-01), Muilenburg et al.
patent: 6796880 (2004-09-01), Redeker et al.
patent: 2001/0036805 (2001-11-01), Birang et al.
patent: 2003/0181137 (2003-09-01), Redeker et al.
patent: 0 468 897 (1992-01-01), None
patent: 0 663 265 (1995-07-01), None
patent: 0 738 561 (1996-10-01), None
patent: 0 824 122 (1998-02-01), None
patent: 0 841 122 (1998-05-01), None
patent: 0 881 040 (1998-12-01), None
patent: 0 881 484 (1998-12-01), None
patent: 1 075 634 (1954-10-01), None
patent: 58-4353 (1983-01-01), None
patent: 62-211927 (1987-09-01), None
patent: 3-234467 (1991-10-01), None
patent: 5-309558 (1993-11-01), None
patent: 7-052032 (1995-02-01), None
patent: 7111256 (1995-04-01), None
patent: 9-036072 (1997-02-01), None
patent: WO 93/20976 (1993-10-01), None
patent: WO 97/06921 (1997-02-01), None
patent: WO 97/20660 (1997-06-01), None
patent: WO 01/12387 (2001-02-01), None
European Search Report for 00300783.2302, dated Apr. 23, 2003 (AMAT/2890.EP).

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