Abrading – Abrading process – With tool treating or forming
Patent
1995-10-27
1999-08-17
Rose, Robert A.
Abrading
Abrading process
With tool treating or forming
451 41, 451443, 451285, 451287, 451289, B24B 2118
Patent
active
059385073
ABSTRACT:
A conditioner apparatus uses one or more linear conditioners. The linear conditioners extend from the edge of the polishing pad almost to the center of the pad. The conditioner apparatus may use two conditioner rods located on either side of a radial segment. The rods gimbal so that if one rod rises, the other rod is forced downwardly. In addition, the rods can pivot independently about a lateral axis, but they cannot pivot around the vertical axis. The linear conditioners may be actuated by a piezoelectric member or swept by an arm toward and away from the center of the polishing pad.
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patent: 5690544 (1997-11-01), Sakurai
Pad Conditioning by Research Disclosure Feb. 1991.
Birang Manoocher
Blumenkranz Stephen J.
Goldspiel Alfred A.
Ko Sen-Hou
Nystrom James C.
Applied Materials Inc.
Nguyen George
Rose Robert A.
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