Light modulated detection system for atomic force microscopes

Details Light modulated detection system for atomic force microscopes Light modulated detection system for atomic force microscopes

1993-11-09

1994-10-18

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250306, G01N 2300, G01B 1100

Patent

active

053571053

ABSTRACT:
A scanning force microscope is provided with apparatus to modify the light source with a modulation scheme. Information relative to scanning tip motion is included in a modulated light beam which is then demodulated and filtered to recover the information in the form of a signal which corresponds to and is representative of a chosen parameter of tip motion.

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patent: 4889988 (1989-12-01), Elings et al.
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patent: 5025658 (1991-06-01), Elings et al.
patent: 5141319 (1992-08-01), Kajimura et al.
patent: 5283442 (1994-02-01), Martin et al.
patent: 5298975 (1994-03-01), Khoury et al.

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