Ion detector for ion beam applications

Details Ion detector for ion beam applications Ion detector for ion beam applications

2006-10-10

2006-10-10

Vanore, David A. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

C250S397000, C250S492210

Reexamination Certificate

active

07119333

ABSTRACT:
Detection of weak ion currents scattered from a sample by an ion beam is improved by the use of a multiplier system in which a conversion electrode converts incident ions to a number of secondary electrons multiplied by a multiplication factor, the secondary electrons being attracted to an electron detector by an appropriate bias. In one version, the detector is a two stage system, in which the secondary electrons strike a scintillator that emits photons that are detected in a photon detector such as a photomultiplier or a CCD.

REFERENCES:
patent: 3898456 (1975-08-01), Dietz
patent: 5434422 (1995-07-01), Iwamoto et al.
patent: 5635836 (1997-06-01), Kirtley et al.
patent: 5922179 (1999-07-01), Mitro et al.
patent: 6365905 (2002-04-01), Koyama et al.
patent: 6407850 (2002-06-01), Rojo et al.
patent: 6501077 (2002-12-01), Sawahata et al.
patent: 6787772 (2004-09-01), Ose et al.
patent: 6885001 (2005-04-01), Ose et al.
patent: 2002/0005492 (2002-01-01), Hashikawa et al.
patent: 2002/0050565 (2002-05-01), Tokuda et al.
patent: 2004/0060904 (2004-04-01), Herschbein et al.
patent: 2004/0112857 (2004-06-01), Herschbein et al.
patent: 2004/0129879 (2004-07-01), Furiki et al.
patent: 2004/0132287 (2004-07-01), Fischer et al.
Students abstracts: LBNL—Materials Sciences, “Student Abstracts: Materials Sciences at LBNL”, http://www.scied.science.doe.gov/scied/Abstracts2003/LBNLms.htm, 2 pages.
Training Courses 2004, FEI Company, Scanning Electron Microscopy, Small Dualbeam and Applications, 17 Pages.
SEM Substages and SPM Accessories from Ernest F. Fullam, Inc., 7 pages, http:www.fullam.com/Sem—subs.htm, “SEM SUBSTAGES”.

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