Ion beam device and ion beam processing method

Details Ion beam device and ion beam processing method Ion beam device and ion beam processing method

2007-10-02

2007-10-02

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

C250S492210

Reexamination Certificate

active

10525311

ABSTRACT:
There is provided a liquid metal ion beam irradiation device for irradiating a specific portion of a sample6with a prescribed liquid metal ion beam so as to form a cross section, and a gaseous ion beam irradiation device7for scanning a prescribed region (observation region) of the cross section using a gaseous ion beam focused to a prescribed diameter and removing a damaged layer on the prescribed region.

REFERENCES:
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patent: 5574280 (1996-11-01), Fujii et al.
patent: 6838685 (2005-01-01), Kodama et al.
patent: 2002/0017619 (2002-02-01), Hirose et al.
patent: 2005/0236587 (2005-10-01), Kodama et al.
patent: 2001 345360 (2001-12-01), None

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