Integration method of a semiconductor device having a...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

Reexamination Certificate

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C438S270000, C438S243000

Reexamination Certificate

active

06939765

ABSTRACT:
Embodiments of the invention are directed to an integrated circuit device and a method for forming the device. In some embodiments of the invention, two types of transistors are formed on a single substrate, transistors: transistors having a recessed gate, and transistors having a planer gate electrode. In other embodiments, transistors having a recessed gate are formed in multiple areas of the same substrate. Additionally, gates of the transistors in more than one region may be formed simultaneously.

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patent: 6214670 (2001-04-01), Shih et al.
patent: 6475884 (2002-11-01), Hshieh et al.
patent: 6818947 (2004-11-01), Grebs et al.
patent: 6884677 (2005-04-01), Kim
patent: 2003/0003651 (2003-01-01), Divakaruni et al.
patent: 2003/0011032 (2003-01-01), Umebayashi

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