Image sensor and fabrication method thereof

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

Reexamination Certificate

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C438S296000, C257SE21630

Reexamination Certificate

active

07544560

ABSTRACT:
Example embodiments relate to an image sensor and a fabrication method thereof, capable of reducing dark current and a fabrication method thereof. The image sensor may include a semiconductor substrate including an active region defined by an isolation layer, a photoelectric-conversion region and a charge-movement-prevention region formed at an interface between the photoelectric-conversion region and the isolation layer.

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patent: 7358108 (2008-04-01), Han et al.
patent: 2005/0176167 (2005-08-01), Lee
patent: 2005/0179072 (2005-08-01), Rhodes
patent: 2006/0131624 (2006-06-01), Katsuno et al.
patent: 05-190825 (1993-07-01), None
patent: 1020030001795 (2003-01-01), None
patent: 10-2003-056323 (2003-07-01), None
patent: 10-2003-056324 (2003-07-01), None
patent: 1020030056324 (2003-07-01), None
Office Action for corresponding Korean Application No. 10-2005-074445 dated Sep. 30, 2006.

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