Hybrid metallic wire and methods of fabricating same

Details Hybrid metallic wire and methods of fabricating same Hybrid metallic wire and methods of fabricating same

2011-06-07

2011-06-07

Smith, Zandra (Department: 2822)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S627000, C438S653000, C257S751000, C257S761000

Reexamination Certificate

active

07955971

ABSTRACT:
A structure and methods of fabricating the structure. The structure comprising: a trench in a dielectric layer; an electrically conductive liner, an electrically conductive core conductor and an electrically conductive fill material filling voids between said liner and said core conductor.

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