Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2006-10-10
2006-10-10
Huynh, Andy (Department: 2818)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
C438S199000
Reexamination Certificate
active
07119404
ABSTRACT:
Strained channel transistors including a PMOS and NMOS device pair to improve an NMOS device performance without substantially degrading PMOS device performance and method for forming the same, the method including providing a semiconductor substrate; forming strained shallow trench isolation regions in the semiconductor substrate; forming PMOS and NMOS devices on the semiconductor substrate including doped source and drain regions; forming a tensile strained contact etching stop layer (CESL) over the PMOS and NMOS devices; and, forming a tensile strained dielectric insulating layer over the CESL layer.
REFERENCES:
patent: 5989978 (1999-11-01), Peidous
patent: 6472306 (2002-10-01), Lee et al.
patent: 2004/0159834 (2004-08-01), Huang et al.
patent: 2004/0235236 (2004-11-01), Hoffmann et al.
patent: 2004/0262683 (2004-12-01), Bohr et al.
patent: 2004/0262784 (2004-12-01), Doris et al.
patent: 2005/0017286 (2005-01-01), Yeo et al.
patent: 2005/0194596 (2005-09-01), Chen et al.
patent: 2005/0214998 (2005-09-01), Chen et al.
Chang Cheng-Hung
Chang Weng
Fu Chu-Yun
Huynh Andy
Lee Calvin
Taiwan Semiconductor Manufacturing Co. Ltd.
Tung & Associates
LandOfFree
High performance strained channel MOSFETs by coupled stress... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with High performance strained channel MOSFETs by coupled stress..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High performance strained channel MOSFETs by coupled stress... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3699830