Radiant energy – Supported for nonsignalling objects of irradiation – With source support
Reexamination Certificate
2006-06-15
2010-02-16
Wells, Nikita (Department: 2881)
Radiant energy
Supported for nonsignalling objects of irradiation
With source support
C250S50400H, C250S453110
Reexamination Certificate
active
07663121
ABSTRACT:
An ultraviolet (UV) cure chamber enables curing a dielectric material disposed on a substrate and in situ cleaning thereof. A tandem process chamber provides two separate and adjacent process regions defined by a body covered with a lid having windows aligned respectively above each process region. One or more UV bulbs per process region that are covered by housings coupled to the lid emit UV light directed through the windows onto substrates located within the process regions. The UV bulbs can be an array of light emitting diodes or bulbs utilizing a source such as microwave or radio frequency. The UV light can be pulsed during a cure process. Using oxygen radical/ozone generated remotely and/or in-situ accomplishes cleaning of the chamber. Use of lamp arrays, relative motion of the substrate and lamp head, and real-time modification of lamp reflector shape and/or position can enhance uniformity of substrate illumination.
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Prosecution History of U.S. Appl. No
Baluja Sanjeev
Chang Josephine
Cho Tom
Hendrickson Scott A.
Ho Dustin W.
Applied Materials Inc.
Patterson & Sheridan
Smyth Andrew
Wells Nikita
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