4. Compositions
  5. Fire-extinguishing
  6. Foam-stabilizant or colloid-stabilizant containing

Tom Cho

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Antenna coil assemblies for substrate processing chambers

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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CVD Processing chamber

Coating apparatus – Gas or vapor deposition
Patent

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CVD processing chamber

Compositions – Fire-extinguishing – Foam-stabilizant or colloid-stabilizant containing
Patent

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Exhaust baffle for uniform gas flow pattern

Coating apparatus – Gas or vapor deposition
Patent

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High efficiency UV curing system

Radiant energy – Supported for nonsignalling objects of irradiation – With source support
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1453953

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