4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. Insulative material deposited upon semiconductive substrate

Dustin W. Ho

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High efficiency UV curing system

Radiant energy – Supported for nonsignalling objects of irradiation – With source support
Reexamination Certificate

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Method of improving initiation layer for low-k dielectric...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method of improving initiation layer for low-k dielectric...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Multi-stage curing of low K nano-porous films

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Ultraviolet reflector with coolant gas holes and method

Radiant energy – Radiant energy generation and sources – With radiation modifying member
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Profile ID: LFUS-PAI-P-2215251

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