High current density particle beam system

Details High current density particle beam system High current density particle beam system

2005-02-17

2010-02-16

Vanore, David A (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S311000, C250S3960ML, C250S492100, C250S492300, C250S505100, C850S009000, C850S063000

Reexamination Certificate

active

07663102

ABSTRACT:
The present invention relates to charged particle beam devices. The devices comprise an emitter for emitting charged particles; an aperture arrangement with at least two apertures for separating the emitted charged particles into at least two independent charged particle beams; and an objective lens for focusing the at least two independent charged particle beams, whereby the independent charged particle beams are focused onto the same location within the focal plane.

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International Search Report, PCT/EP/2005/001637, Feb. 17, 2005.

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