High-aspect-ratio-microstructure (HARM)

Details High-aspect-ratio-microstructure (HARM) High-aspect-ratio-microstructure (HARM)

2006-08-08

2006-08-08

Tamai, Karl (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

C438S052000

Reexamination Certificate

active

07088030

ABSTRACT:
A high-aspect-ratio-microstructure (HARM) is provided. The structure includes: a substrate; a lower structure with a comb shape fixedly mounted on said substrate and having first plural comb fingers, wherein each of the first plural comb fingers has a thin slot thereon; an upper structure with a comb shape having second plural comb fingers, wherein the lower structure and the upper structure have a height difference therebetween so as to form an uneven surface; and a lateral strengthening structure formed at vertically peripheral walls of the first plural comb fingers and the second plural comb fingers for protecting the plural first and second comb fingers.

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