4. Optical: systems and elements
  5. Light interference
  6. Electrically or mechanically variable

Jerwei Hsieh

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Corner compensation method for fabricating MEMS and...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
Reexamination Certificate

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Corner compensation method for fabricating MEMS and...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate

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High-aspect-ratio-microstructure (HARM)

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Reexamination Certificate

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Selective etching method

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Tunable dispersive optical system

Optical: systems and elements – Light interference – Electrically or mechanically variable
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Profile ID: LFUS-PAI-P-2429636

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