4. Plastic and nonmetallic article shaping or treating: processes
  5. Optical article shaping or treating
  6. Utilizing plasma, electric, electromagnetic, particulate, or...

Weileun Fang

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Actuating mechanism for rotating micro-mirror

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Reexamination Certificate

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Corner compensation method for fabricating MEMS and...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
Reexamination Certificate

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Corner compensation method for fabricating MEMS and...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate

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High-aspect-ratio-microstructure (HARM)

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Reexamination Certificate

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Integration manufacturing process for MEMS device

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Profile ID: LFUS-PAI-P-2224052

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