Coating apparatus
Gas or vapor deposition
Having means to expose a portion of a substrate to coating...
Inventor
active
Clamp ring for shielding a substrate during film layer depositio
High aspect ratio clamp ring
Method and apparatus for both mechanically and electrostatically
Method and apparatus for heating and cooling substrates
Method and apparatus for heating and cooling substrates
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Profile ID: LFUS-PAI-P-1575348