Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Reexamination Certificate
2006-06-27
2006-06-27
McPherson, John A. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
C430S321000, C430S330000, C430S296000, C385S008000
Reexamination Certificate
active
07067240
ABSTRACT:
The subject invention relates to the fabrication of micro-optical structures in a glass-like transparent material using conventional photolithography processing steps. The glass-like material is a spin-on glass (SOG) material, which behaves like a negative-tone photoresist, and has high quality optical properties similar to those of glass. The present invention can take advantage of gray scale photomasks to illuminate the uncured spin-on material with various illumination intensities, thus resulting in variations in resultant film thickness of the SOG material after the chemical development step. This results in micro-optical structures that can be fabricated with the desired shapes, depending on the transmission characteristics of each region of the gray scale photomask.
REFERENCES:
patent: 2002/0172894 (2002-11-01), Fallahi et al.
Benrashid Ramazan
Dupriez Pascal
Farahi Faramarz
Moyer Patrick
Chacko-Davis Daborah
McPherson John A.
Sayko, Jr. Andrew F.
Waveguide Solutions, Inc.
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