Data processing: structural design – modeling – simulation – and em – Simulating electronic device or electrical system
Reexamination Certificate
2006-10-04
2009-11-03
Rodriguez, Paul L (Department: 2123)
Data processing: structural design, modeling, simulation, and em
Simulating electronic device or electrical system
C702S040000, C700S121000, C382S151000
Reexamination Certificate
active
07613598
ABSTRACT:
A method for modeling samples includes the use of control points to define lines profiles and other geometric shapes. Each control point used within a model influences a shape within the model. Typically, the control points are used in a connect-the-dots fashion where a set of dots defines the outline or profile of a shape. The layers within the sample are typically modeled independently of the shape defined using the control points. The overall result is to minimize the number of parameters used to model shapes while maintaining the accuracy of the resulting scatterometry models.
REFERENCES:
patent: 5607800 (1997-03-01), Ziger
patent: 5739909 (1998-04-01), Blayo et al.
patent: 5867276 (1999-02-01), McNeil et al.
patent: 5889593 (1999-03-01), Bareket
patent: 5963329 (1999-10-01), Conrad et al.
patent: 6278519 (2001-08-01), Rosencwaig et al.
patent: 6429943 (2002-08-01), Opsal et al.
patent: 6483580 (2002-11-01), Xu et al.
patent: 6704661 (2004-03-01), Opsal et al.
patent: 6778911 (2004-08-01), Opsal et al.
patent: 6919964 (2005-07-01), Chu
patent: 6947850 (2005-09-01), Opsal et al.
patent: 6993177 (2006-01-01), Bachelder
patent: 7031848 (2006-04-01), Opsal et al.
patent: 7363099 (2008-04-01), Smith et al.
patent: 2001/0051856 (2001-12-01), Niu et al.
patent: 2002/0158193 (2002-10-01), Sezginer et al.
patent: 2003/0067496 (2003-04-01), Tasker et al.
patent: 2003/0147086 (2003-08-01), Rosencwaig et al.
patent: 2003/0151054 (2003-08-01), Kuznicki et al.
patent: 2003/0197872 (2003-10-01), Littau et al.
patent: 2004/0176928 (2004-09-01), Johnson
patent: 2005/0231737 (2005-10-01), Chu
patent: 2005/0280810 (2005-12-01), Johnson
patent: WO 01/97280 (2001-12-01), None
patent: WO 02/27288 (2002-04-01), None
patent: WO 03/054475 (2003-07-01), None
Cao Xuelong
Chu Hanyou
Opsal Jon
Wen Youxian
KLA-Tencor Corp.
Morrison & Foerster / LLP
Rodriguez Paul L
Thangavelu Kandasamy
LandOfFree
Global shape definition method for scatterometry does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Global shape definition method for scatterometry, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Global shape definition method for scatterometry will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4068297