4. Optics: measuring and testing
  5. Shape or surface configuration

Xuelong Cao

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Global shape definition method for scatterometry

Optics: measuring and testing – Shape or surface configuration
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Global shape definition method for scatterometry

Data processing: structural design – modeling – simulation – and em – Simulating electronic device or electrical system
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Method of compensating photomask data for the effects of...

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
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Profile ID: LFUS-PAI-P-3010064

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