4. Semiconductor device manufacturing: process
  5. With measuring or testing
  6. Optical characteristic sensed

Youxian Wen

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Apparatus for optical measurements of nitrogen concentration...

Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate

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Apparatus for optical measurements of nitrogen concentration...

Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate

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Apparatus for optical measurements of nitrogen concentration...

Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate

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Determining transmittance of a photomask using optical...

Optics: measuring and testing – Dimension
Reexamination Certificate

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Evaluation of etching processes in semiconductors

Semiconductor device manufacturing: process – With measuring or testing – Optical characteristic sensed
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2513082

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