Forming a transparent window in a polishing pad for a chemical m

Details Forming a transparent window in a polishing pad for a chemical m Forming a transparent window in a polishing pad for a chemical m

1996-08-16

1999-04-13

Scherbel, David A.

Abrading

Flexible-member tool, per se

451283, 451285, 451287, B24D 1100

Patent

active

058937960

ABSTRACT:
The polishing pad for a chemical mechanical polishing apparatus and a method of making the same. The polishing pad has a covering lawyer with a polishing surface and a backing layer which is adjacent to the platen. A first opening in the covering layer with a first cross-sectional area and a second opening in the backing layer with a second, different cross-sectional area form an aperture through the polishing pad. A substantially transparent polyurethane plug is positioned in the aperture, and an adhesive material fixes the plug in the aperture.

REFERENCES:
patent: 5020283 (1991-06-01), Tuttle
patent: 5177908 (1993-01-01), Tuttle
patent: 5297364 (1994-03-01), Tuttle
patent: 5329734 (1994-07-01), Yu
patent: 5394655 (1995-03-01), Allen et al.
patent: 5413941 (1995-05-01), Koos et al.
patent: 5433651 (1995-07-01), Lustig et al.
patent: 5605760 (1997-02-01), Roberts

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