4. Abrading
  5. Flexible-member tool, per se

Allan Gleason

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Apparatus and method for in-situ endpoint detection for...

Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate

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Apparatus and method for in-situ endpoint detection for...

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate

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Apparatus and method for in-situ endpoint detection for...

Abrasive tool making process – material – or composition – Pore forming
Reexamination Certificate

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Apparatus and method for in-situ endpoint detection for...

Abrasive tool making process – material – or composition – Pore forming
Reexamination Certificate

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Forming a transparent window in a polishing pad for a chemical m

Abrading – Flexible-member tool – per se
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Profile ID: LFUS-PAI-P-401021

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